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Toh-Ming Lu
— Ray Palmer Baker Distinguished Professor of Physics
— Director, Center for Advanced Interconnect Systems
Technologies
Rensselaer Polytechnic Institute
Education:
— Ph.D., Physics, University of Wisconsin, Madison, 1976
— M.S., Physics, Worcester Polytechnic Institute, 1971
— B.S., Physics, Cheng Kung University, Taiwan, 1968
Career Highlights:
Lu is the director of the Semiconductor Research Corporation
(SRC) Center for Advanced Interconnect Systems Technologies,
through which 25 faculty and 45 graduate students from 13
universities are researching advanced interconnects. He previously
served as the chairman of the Physics Department at Rensselaer
from 1992 to 1997. Lu is a Fellow of the American Physical
Society and the American Vacuum Society. He has earned numerous
other honors, including Rensselaer's Early Career Award in
1986, the SRC Invention Award in 1988, the Rensselaer Center
for Integrated Electronics Faculty Award in 1993, and the
Williams Wiley Distinguished Faculty Award in 2002.
Seventeen of his 26 former doctoral students have earned best
thesis/paper awards. Major semiconductor related companies
such as IBM, Intel, AMD, Motorola, MA/COM, Analog, Eaton,
and GE, as well as government laboratories have hired Lu's
former students.
Research Areas:
Lu's recent interests include the growth and characterization
of nano-photonic structures for integrated optics applications;
physical self-assembly of 3D nanostructures that possess large
photonic bandgap; measurements of mechanical properties of
isolated nanostructures; interfacial activation of dielectric
surface for advanced metallization; atomic layer deposition
of metal on dielectric surfaces using metallorganic precursors;
and real-time diffraction measurements of thin film microstructures
during growth.
Selected Publications:
Y.-C. Chen, N.R. Raravikar, Y.-P. Zhao, L.S. Schadler, P.M.
Ajayan, T.-M. Lu, G.-C. Wang, and X.-C. Zhang, "Ultrafast
Optical Switch Properties of Single-Wall Carbon Nanotube Polymer
Composites at 1.55µm," Applied Physics Letters,
81,
975, (2002).
Y.-P. Zhao, D.-X. Ye, G.-C. Wang, and T.-M.
Lu, "Novel Nano-Column and Nano-Flower Arrays by Glancing
Angle Deposition," Nano Letters, 2,
351, (2002).
Y.-P. Zhao, D.-X. Ye, P.-I. Wang, G.-C.
Wang, and T.-M. Lu, "Fabrication of Si Nano-Columns and
Si Square Spirals on Self-assembled Monolayer Colloid Substrates,"
International Journal of Nanoscience, 1,
87, (2002).
J. Senkevich, B. Li, G.-R. Yang, G.-C. Wang,
and T.-M. Lu, "Copper Wetting of a Tetrasulfide Self-Assembled
Monolayer," Journal of Electrochemical and Solid State
Letters, 5, C94, (2002).
D.-X. Ye, Y.-P. Zhao, G.-R. Yang, G.-C.
Wang, and T.-M. Lu, "Manipulating the Column Tilt Angles
of Nanocolumnar Films by Glancing-Angle Deposition,"
Nanotechnology, 13,
615, (2002).
J.P. Singh, G.R. Yang, T.-M. Lu, and G.-C.
Wang, "Retardation of Oxidation in Co Nano Columns,"
Applied Physics Letters, 81,
4601, (2002).
S.L. Lee, D. Windover, T.-M. Lu, and M.
Audino, "In-situ Phase Evolution Study in Magnetron Sputtered
Tantalum Thin Films," Thin Solid Films, 420-421,
287, (2002).
T. Karabacak, Y.-P. Zhao, G.-C. Wang, and
T.-M. Lu, "Growth Front Roughening in Silicon Nitride
Films by Plasma-Enhanced Chemical Vapor Deposition,"
Physical Review B, 66,
075329/1, (2002).
A. Mallikarjunan, S.P. Murarka, and T.-M.
Lu, "Mobile Ion Detection in Organosiloxane Polymer Using
Triangular Voltage Sweep," Journal of Electrochemical
Society, 149, F155,
(2002).
J.B. Fortin and T.-M. Lu, "A Model
for the Chemical Vapor Deposition of Poly(para-xylylene) (Parylene)
Thin Films," Chemistry of Materials, 14,
1945, (2002).
Contact Information:
Toh-Ming Lu
Rensselaer Polytechnic Institute
Troy, N.Y. 12180-3590
(518) 276-2979
lut@rpi.edu
www.rpi.edu/~lut
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